JPS62110257U - - Google Patents
Info
- Publication number
- JPS62110257U JPS62110257U JP19950785U JP19950785U JPS62110257U JP S62110257 U JPS62110257 U JP S62110257U JP 19950785 U JP19950785 U JP 19950785U JP 19950785 U JP19950785 U JP 19950785U JP S62110257 U JPS62110257 U JP S62110257U
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- vapor deposition
- arsenic
- vapor
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000001556 precipitation Methods 0.000 claims 2
- LULLIKNODDLMDQ-UHFFFAOYSA-N arsenic(3+) Chemical compound [As+3] LULLIKNODDLMDQ-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Manufacture And Refinement Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62110257U true JPS62110257U (en]) | 1987-07-14 |
| JPH0315543Y2 JPH0315543Y2 (en]) | 1991-04-04 |
Family
ID=31161197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19950785U Expired JPH0315543Y2 (en]) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315543Y2 (en]) |
-
1985
- 1985-12-27 JP JP19950785U patent/JPH0315543Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315543Y2 (en]) | 1991-04-04 |